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Products
The products listed here are for overseas markets, not for Japan domestic.
- Science Instruments / Analysis Equipment
- Particle Counters
- RION Liquid-borne Particle Counters KS-41A
Ideal for Monitoring 0.15 µm Particles in Photoresist, SOG, and Other Solutions
Integrated leak sensor with alarm output
User selectable channels within measurement range (using KE-40B1 function)
Liquid-borne Particle Counters
Model:
KS-41A
Maker:
RION CO., LTD.
Features
- Detects particles in photoresist down to 0.15 μm size, at a flow rate of 10 mL/min
- Particle size range
Up to 10 user selectable channels (by KE-40B1) from 0.15 μm to 0.5 μm
Factory default setting : four channels (≥0.15 μm, ≥0.2 μm, ≥0.3 μm, ≥0.5 μm) - Integrated leak sensor with alarm output
Specifications
| Item | Specifications |
|---|---|
| Optical system | Light-scattering method |
| Light source | Laser diode (wavelength: 830 nm, rated output 200 mW) |
| Materials of parts exposed to sample fluid | Synthetic quartz, PFA |
| Measurement size range | 4 channels (Factory default): ≥0.15 µm, ≥0.2 µm, ≥0.3 µm, ≥0.5 µm |
| Setting range | 0.15 µm to 0.5 µm |
| Flow rate | 10 mL/min |
| Maximum particle number concentration | 1,200 particles/mL (coincidence loss 5%) |
| Power requirements | DC12 V (Supplied by KE-40B1) |
| Dimensions | Approx. 160 (H) x 300 (W) x 251 (D) mm |
| Weight | Approx. 7.5 kg |
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