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Products
The products listed here are for overseas markets, not for Japan domestic.
- Science Instruments / Analysis Equipment
- Particle Counters
- RION Liquid-borne Particle Counters KS-41B
Measures 0.1 µm Particles in Photoresist, SOG and other solutions
Can be connected to the multiple monitoring system
Liquid-borne Particle Counters
Model:
KS-41B
Maker:
RION CO., LTD.
Features
- Detects particles in photoresist down to 0.1 μm size (0.07 μm as Option＊), at a flow rate of 5 mL/min
* For measuring clear solutions such as UPW - Up to 10 user selectable channels (by KE-40B1) from 0.1 μm to 0.5 μm
Factory default setting: five channels (≥0.1 μm, ≥0.15 μm, ≥0.2 μm, ≥0.3 μm, ≥0.5 μm) - Can be connected to the multiple monitoring system
Specifications
| Item | Specifications |
|---|---|
| Optical system | Light-scattering method |
| Light source | Diode pumped solid state laser (wavelength: 532 nm, rated output 500 mW) |
| Materials of parts exposed to sample fluid | Synthetic quartz, PFA |
| Measurement size range | 5 channels (Factory default): ≥0.1 µm, ≥0.15 µm, ≥0.2 µm, ≥0.3 µm, ≥0.5 µm |
| Setting range | 0.1 µm to 0.5 µm |
| Flow rate | 5 mL/min |
| Maximum particle number concentration | 9,600 particles/mL (coincidence loss 10%) |
| Power requirements | DC12 V (Supplied by KE-40B1) |
| Dimensions | Approx. 164 (H) x 464 (W) x 305 (D) mm (excl. protruding parts) |
| Weight | Approx. 12.5 kg |
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