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Products
The products listed here are for overseas markets, not for Japan domestic.
- Electronic Measuring Instruments
- Thermometers / Hygrometers
- ANRITSU METER Silicon Wafer With Thermocouple Model AW Series AW-0805K-A-TS1-ANP
Temperature measurement of silicon wafers in etching equipment.
High-precision heat contact position is ensured by performing precision hole processing on the wafer.
A test report is attached to all products as a standard accessory. Realization of highly
accurate temperature measurement is possible.
Wafer size, thermocouple sensing point, insulation coating can be customized.
We also manufacture special order products.
Silicon Wafer With Thermocouple Model AW Series
Model:
AW-0805K-A-TS1-ANP
Maker:
ANRITSU METER CO., LTD.
Features
- Temperature range : 0℃ to 500℃
- Tolerance : ±2.5℃ (at 100℃)
- Wafer size : 8in
- Sensor points : 5points
- Insulation coating : Alumina fiber sleeve
- Cable length : 1m
- Terminal shape : ANP(miniature plug)
- Including Test report (100,200,300,400,490℃)
Specifications
| Model (Select the number for each “*”) | AW-***K-T | AW-***K-A | AW-***K-S | |
|---|---|---|---|---|
| Thermocouple Type | K | |||
| Operating Temperature Range (of Wafer and Insulating part) | 0～260℃ | 0～500℃ | 0～500℃ | |
| Tolerance | 0℃ or more 100℃ or under | ±2.5℃ | ±2.5℃ | ±2.5℃ |
| 100℃ over 200℃ or under | ±2.5℃ | ±5.0℃ | ±5.0℃ | |
| 200℃ over 300℃ or under | ±2.5℃ (260℃ or under) | ±6.0℃ | ±6.0℃ | |
| 300℃ over 400℃ or under | ? | ±7.0℃ | ±7.0℃ | |
| 400℃ over 500℃ or under | ? | ±8.0℃ | ±8.0℃ | |
| Point(s) for Test Report | 100, 150, 200, 250℃ | 100, 200, 300, 400, 490℃ | ||
| Wafer Size | 5 / 8 / 12 inches (available other sizes as an option) | |||
| Thermocouple Wire Diameter | φ0.13mm | |||
| Thermocouple Insulation Material | Teflon | Alumina Fiber Sleeve | Quartz Tube | |
| Temperature Range for General Calibration (by manufacturer)*Optional | 50～250℃ | 50～490℃ | 50～490℃ | |
| Repair | Repairable | |||
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