This website uses cookies so that we can provide you with the best user experience possible. Cookie information is stored in your browser and performs functions such as recognising you when you return to our website and helping our team to understand which sections of the website you find most interesting and useful.
Products
The products listed here are for overseas markets, not for Japan domestic.
- Science Instruments / Analysis Equipment
- Particle Counters
- RION Airborne Particle Counters KS-93
Ideally suited for cleanliness control of specialgas supply systems
Enables inline measurement of semiconductor special materialgases
Airborne Particle Counters
Model:
KS-93
Maker:
RION CO., LTD.
Features
- Simultaneous 5-channels particle measurement
0.1 μm and above, 0.15 μm and above, 0.2 μm and above, 0.3 μm and above, 0.5 μm and above - Flow rate: 100 mL/min, max. 300 mL/min.
- Leak-tight, outgas-free conditions and no dead space
Specifications
| Item | Specifications |
|---|---|
| Optical system | Light-scattering method |
| Light source | Laser diode (wavelength: 830 nm, rated output 200 mW) |
| Measurement size range | 5 channels: ≥0.1 µm, ≥0.15 µm, ≥0.2 µm, ≥0.3 µm, ≥0.6 µm |
| Flow rate | 100 mL/min |
| Maximum particle number concentration | 30,000 particles/L (coincidence loss 5%) |
| Power requirements | 100 V to 240 V AC, 40 VA (including external power requirement KZ-50(accessory)) |
| Dimensions | Approx. 135 (H) x 280 (W) x 150 (D) mm |
| Weight | Approx. 6.5 kg |
| Minimum detectable particle size | 0.1 μm |
Related Article
To view the pdf files, the Adobe Reader from Adobe Systems is required.