Wafer Mapping Unit: Automatic, reliable film thickness mapping for up to 300 mm wafers, ideal for semiconductor manufacturing with self-calibration and cleanliness.

The wafer mapping unit is capable of automatically mapping film thickness measurement over the entire surface of wafers up to 300 mm. The automatic alignment function, self-calibration function, and high flatness wafer chuck enable highly reliable film thickness measurement. This unit is used in combination with the compact film thickness monitor.

It can be installed at the load port of semiconductor manufacturing equipment to control the film thickness on the manufacturing equipment while maintaining cleanliness.

Automatic wafer Mapping Device

Maker:

Shashin Kagaku

Application

Example of measurement data

Configuration

Specification

	Specification
Installation type	Stand-alone
Target substrate	100 mm, 125 mm, 150 mm, 200 mm, 300 mm Wafer with film
Light source	Selectable below 3 kinds ・ Deuterium Halogen lamp ・ Halogen lamp ・ White color LED
Measurement distance	Max 60 mm
Beam spot	About 3 mmø (Option 1 mmø, but in case, it enables to do alignment)
Film thickness range	10 nm – 50 nm
Max film layer	Max 9 layers
Repeatability	≦ 0.1 nm
Analysis	Curve fitting method FFT method Peak detection method
Measurement time	≦1 sec/point
Data transfer	USB 2.0 Cable ・ For data input ・ For Stage control
Power	Notebook PC 100-240 VAC Max 2A Main Body 100-240 VAC Max 2A Automatic stage part 100-240 VAC Max 2 A
Weight	Notebook PC about 3 kg Main body about 4 kg Automatic stage part about 20 kg
Measurement	Main body (L) about 150 x (W) 160 x (H) 110 mm In case of Deuterium Halogen lamp use Stage part (L) about 500 x (W) 340 x (H) 270 mm
Automatic stage spec	Linear stage Moving area:300 mm Resolution:4μm Max speed:40 mm/sec. Rotating stage Moving area:2-400 degrees Resolution:0.005° Max speed:30°/sec. PC transmit RS-232C (USB cable)
Monitor display	Display film thickness on real time basis Mapping measurement result on graph display Statistic calculation result display

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