Ono Sokki CL-7100 Non-Contact Thickness Meter

Non-Contact Thickness Meter

U.S.-based sales, and delivery available.

The ONO SOKKI CL-7100 series is a non-contact thickness measurement system designed for high-precision inspection of semiconductor wafers, EV battery films, metal sheets, and plastics. Using advanced displacement sensors, it delivers high accuracy, fast response, and multi-point measurement for production lines and laboratory environments. With features such as temperature compensation, Ethernet connectivity, and real-time monitoring, it enables efficient and reliable thickness measurement in demanding industrial applications.

Thickness Meter

Model:

CL-7100

Maker:

ONO SOKKI (Authorized Distributer)

Features

Non-contact measurement

It achieves high reproducibility without physically affecting the object being measured.

High accuracy and high response measurement performance

Supports high-precision measurement with accuracy of ±0.05 to ±0.12% FS (depending on sensors). The update cycle has been reduced from 20 ms to 10 ms. Effective for multi-point measurement and high-speed lines.

Temperature measurement/correction functions, Ethernet (option)

Environmental temperature measurement using the PT-100 temperature sensor and temperature correction are available. By acquiring temperature data simultaneously with thickness measurement, measurement errors caused by temperature variations are compensated, achieving higher-precision measurement. In addtion, remote monitoring and centralized data management are also available via Ethernet communication.

Equipped with a large color LCD touch panel to offer both visibility and intuitive operations

The intuitive menu display allows up to four measurement data items to be shown on a single screen. It also supports hard key operation, enabling use even while wearing gloves.

Compact, lightweight and low power consumption

Approximately 50% smaller and lighter than existing models. Its low-power consumption design reduces environmental impact.

Comparator function (with CL-0731 or CL-0732 option): real-time monitoring of abnormal values

Measurement targets	Conductors/Semiconductors	Insulators
Measurement targets	Items that require cleanliness, such as silicon wafers, steel plates, aluminum plates, hard disks, printed circuit boards, and other metal sheets, as well as soft materials, mirror-finished surfaces, and items that are easily scratched.	Plastics such as glass, polyethylene, and polypropylene. (Thin items made of a single material with uniform properties throughout)

*For measurements of intermediate materials or composite materials in addition to the above-mentioned objects, please contact us.

Connection method

When measuring conductors or semiconductors

Arrange two sensors and the measurement object in parallel within the measurement range, and set the sensor gap value (Gs) in the CL-7100 Series. The measurement object is installed between sensors A or B, and the gap value (Ga, Gb) between each sensor and the measurement object is measured, and the thickness (t) can be obtained.

When measuring insulators (option)

Install the sensor and the conductor (reference floor) in parallel, and set the sensor voltage output value (Gs) in the CL-7100 series. When the measurement object is inserted between the sensor and the conductor (reference floor), the sensor voltage output becomes Ga, and the thickness (t) is obtained from this change in sensor voltage and the relative permittivity εr.

Specifications

Measurement items	Thickness: Thickness of the measurement target (conductors/ semiconductors/insulators) when CL-0740 installed
	Gap A：Gap between Sensor A and the measurement target (conductors/semiconductors only)
	Gap B：Gap between Sensor B and the measurement target (conductors/semiconductors only)
	A-B：Height difference/parallelism (A-B) (conductors/semiconductors only)
	Temperature：Temperature * when CL-0741 installd
Compatible sensor/Resolution		Sensor	Resolution
	Standard	VE-2011/VE-5011/VE-1021 VE-5010/VE-1020	0.1 µm
		VE-1520	0.5 µm
		VE-3020 VE-8020/VE-8021	1.0 µm
	High resolution (when CL-0720 (option) installed)	VE-2011	0.02 µm
		VE-5010/ VE-5011	0.05 µm *when CL-0722 installed: 0.02µm
		VE-1020/ VE-1021	0.1 µm
		VE-1520	0.2 µm
		VE-3020 VE-8020/VE-8021	0.5 µm
Measurement accuracy		Sensor	Accuracy
	Standard	VE-5010/VE-1020/VE-1520/VE-3020/VE-8020/ VE-2011/VE-5011/VE-1021/VE-8021	± 0.15 % FS
	High resolution (when CL-0720 (option) installed)	VE-2011	± 0.12 % FS
		VE-5010/VE-5011	± 0.10 % FS
		VE-1020/VE-1021/VE-1520/VE-3020/VE-8020/ VE-8021	± 0.05 % FS
Temperature characteristics	Within ±0.5 % FS/°C Reference temperature: 23 °C
Sensor input cable	VL-1520(1.5 ｍ, both ends straight connector) / VL-1521(1.5 m, L type⇔Straight connector)
Display	4.3 inch　touch panel LCD (up to 4 items display)
Remote signal input/output	Input/output method	Input	Open collector
		Output	1 make contact output
	Function	Input signal	START/STOP/PAUSE/CALIB
		Output signal	•Select from [Status] and [Error] •+5 V voltage output
	Compatible connector	ER03-PB8M-T manufactured by Tajimi Electronics
Interface	RS-232C, Ethernet (option, CL-0751)
General specifications	Power supply	100 to 240 VAC ±10 %, 50/60 Hz, Power consumption: 36 VA or less
	Outer dimension	210(W) × 99(H) × 150(D) mm (excluding protrusions)
	Weight	Approx. 1.6 kg
	Operating temperature range	0 ℃ to 40 ℃
	Storage temperature range	–10 ℃ to 50 ℃
	Operating humidity range	20 % to 85 % （no condensation）
	Storage humidity range	20 % to 85 % （no condensation）
	Warm-up time	At least 40 minutes
	Electric shock protection class	Ⅰ(3 pin)
	Overvoltage category	Ⅱ
	Operating environment	• Outdoor use (laboratory/factory)
		• Use at an altitude of up to 2,000 m
		• Contamination level: 2
	Comforming to standards	RoHS Directive	2011/65/EU Standard：EN IEC 63000
		Low Voltage Directive	EN 61010-1
	Accessories	• AC power cable • Remote connector（made by Tajimi：ER03-PB8M） • Instruction manual
Accessories for CL-7100S	CL-0710　Sensor amplifier	Outer dimension	81(W) mm × 48(H) mm × 35(D) mm(excluding protrusions)
		Weight	Approx. 210 g
	Dedicated cable (2.5 m)　* up to 10 m (option)

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