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項目清單
產品資訊
- 産品資訊
- Tsukuba Seiko ESC Stage
是作為用於生產設備的吸附STAGE而提供的靜電吸盤
作為纖薄易碎的多孔質原材料的吸附工具，被應用於從特殊環境(真空加熱環境）到無需切換機型等多種用途。還可搭配專用DC電源成套銷售，結合應用製程工件的尺寸，進行系統提案。
ESC Stage
Maker:
Tsukuba Seiko
規格
| 對象工件 | 半導體晶圓，金屬箔，玻璃，多孔質原材料，薄膜，金屬箔，紙張 |
| 吸附對象工件 | 智慧手機、平板電腦、個人電腦、電視機面板、半導體、電子器件、燃料電池 |
| 吸附對象材質 | 玻璃、薄膜、Si、金屬箔、紙張、陶瓷等 |
| 吸附對象應用程序 | 成膜裝置、蝕刻裝置、真空貼合裝置、檢查裝置、各種搬運裝置 |
| ESC STAGE的結構類型 | 靜電吸盤吸附部+專用DC電源 |
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