All accuracy specifications valid for a CMM with an accuracy of 2µm + L/350 or better using manufacturer supplied test sphere.
1 Nikon Metrology test comparable to EN/ISO 10360-2 MPEP using 1ơ sphere fit.
2 Nikon Metrology test comparable to EN/ISO 10360-2 MPEE
3 Nikon Metrology test comparable to EN/ISO 10360-5 MPEAL
Accuracy specifications according ISO 10360-8:2013:
4 PForm.Sph.1×25:Tr:ODS,MPE : Maximum probing form error using 25 representative points in translatory scanning mode
5 PSize.Sph.All:Tr:ODS,MPE : Maximum probing size error All using all measured points in translatory scanning mode
6 PForm.Sph.D95%:Tr:ODS,MPL : Maximum probing dispersion value using 95% of the measured points in translatory scanning mode
7 Cone angle : Region of sphere on which the measured points are selected