Hitachi Fluorescent X-ray (XRF) Coating Thickness Gauge FT110A

The FT110A XRF Coating Thickness Gauge has a new auto focus function which automatically focuses on the sample to acquire optical image within a few seconds.

Fluorescent X-ray (XRF) Coating Thickness Gauge FT110A

Maker:

Hitachi High-Tech Corporation.

Features

Easy operation

Once a sample is placed on the stage, an optical image of the sample is automatically displayed.

Precisely measures 50 nm Au coating thickness in 10 seconds

Optimum geometry provides higher sensitivity even under a micro beam, enabling higher measurement accuracy with a round 0.1 or 0.2 mm collimator.

Measurement without the standard sample

Measurement can be done without thickness standard sample(s) by expanding the FP software. Measurement of multilayer film and alloy film can be performed easily.

Easy positioning using the Wide View System (option)

With the new Wide View System (option), the whole sample image can be observed (size max. 250×200 mm) and the desired measurement area can be specified.

Specification

Type	FT110A
Elements	Atomic Numbers 22(Ti) to 83(Bi)
X-ray source	Air-cooled small X-Ray Tube Voltage : 50 kV Current:1 mA
Detector	Proportional Counter
Collimator	Round. 0.1 mm, 0.2 and two other types
Sample Observation	CCD camera (with wide view system)
Sample image focus	Laser Pointer
Filter	Primary filter automatic switching
Sample Stage	[Stage size] 500(W)×400(D)×150(H) mm [Traveling] X : 250 mm, Y : 200 mm
Controller	Desktop Computer with 19 inch LCD Monitor
Application Software	Thin Film FP (All types of thin films: Max 5 layers,10 elements per layer), Calibration
Data Process	Microsoft Excel, Microsoft Word
Safety Functions	Sample door interlock, Sample crash prevention mechanism, Diagnostic Function

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