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Hitachi X-ray (XRF) Coating Thickness Gauge FT160 Series

Equipped with polycapillary X-ray focusing optics and a silicon drift detector, FT160 enables high preciseness and high throughput in nano-order level coating thickness measurement of electronic parts.

X-ray (XRF) Coating Thickness Gauge FT160 Series

Maker:

Hitachi High-Tech Corporation

Feature

  • Polycapillary X-ray focusing optics

Accomplishing highly precise measurement by irradiate high-luminance primary x-ray to the area of about 30 μmφ.

  • Silicon Drift Detector (SDD) as detection system

High count rate silicon drift detector enables highly precise measurement.

  • Automatic measurement assistant function

Precise multi-point automatic measurement function helps high efficiencies of the measurement.

  • Easy operation enabled with simple interface and help function of the software

Daily routine measurements can be conducted easily by using registered application-like recipe.

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  • Safety-conscious instrument design

Adoption of closed housing greatly minimizes the risk of x-ray leakage.
Wide door design improves visibility of the sample and operability of the instrument.

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Specification

Model FT160S FT160Sh FT160 FT160h FT160L FT160Lh
X-ray source Standard High

-energy

Standard High

-energy

Standard High

-energy

Mo W Mo W Mo W
Elements Atomic No. 13(Al) to 92(U)
Sample

stage (mm)

300(W) × 245(D) 420(W) × 320(D) 620(W) × 620(D)
Maximum

sample size

(mm)

300(X) × 245(Y) × 80(Z) 400(X) × 300(Y) × 100(Z) 600(X) × 600(Y) × 20(Z)

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