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Products Infomation

Equipped with polycapillary X-ray focusing optics and a silicon drift detector, FT160 enables high preciseness and high throughput in nano-order level coating thickness measurement of electronic parts.
X-ray (XRF) Coating Thickness Gauge FT160 Series
Maker:
Hitachi High-Tech Corporation
Feature
- Polycapillary X-ray focusing optics
Accomplishing highly precise measurement by irradiate high-luminance primary x-ray to the area of about 30 μmφ.
- Silicon Drift Detector (SDD) as detection system
High count rate silicon drift detector enables highly precise measurement.
- Automatic measurement assistant function
Precise multi-point automatic measurement function helps high efficiencies of the measurement.
- Easy operation enabled with simple interface and help function of the software
Daily routine measurements can be conducted easily by using registered application-like recipe.

- Safety-conscious instrument design
Adoption of closed housing greatly minimizes the risk of x-ray leakage.
Wide door design improves visibility of the sample and operability of the instrument.

Specification
Model | FT160S | FT160Sh | FT160 | FT160h | FT160L | FT160Lh |
---|---|---|---|---|---|---|
X-ray source | Standard | High
-energy |
Standard | High
-energy |
Standard | High
-energy |
Mo | W | Mo | W | Mo | W | |
Elements | Atomic No. 13(Al) to 92(U) | |||||
Sample
stage (mm) |
300(W) × 245(D) | 420(W) × 320(D) | 620(W) × 620(D) | |||
Maximum
sample size (mm) |
300(X) × 245(Y) × 80(Z) | 400(X) × 300(Y) × 100(Z) | 600(X) × 600(Y) × 20(Z) |