CONTENTS CONTENTS

ITEMLIST

Products Infomation

SHINYEI TECHNOLOGY Particle Sensing Monitor AES-FP Series

The Best Way to Monitor and Visualize Cleanliness Level

AES-FP series can detect particles over 0.3μm (or 0.5μm) in cleanroom, semiconductor/food manufacturing process, printing process, hospital facilities, and other environment requiring cleanliness monitoring at Class1,000 to 100,000.

LED display showing cleanliness level supports visualization of suspended particles and is useful for HACCP management. The sensor unit also can constantly detects particles over 0.3μm (or 0.5μm). The compact sensor design is suitable for incorporation into production equipment and installation in a narrow space.

Particle Sensing Monitor / Sensor Unit

Model:

AES-FP Series

Maker:

SHINYEI Technology Co.,LTD.

Key Features

Application

For cleanliness management of semiconductor manufacturing, food factories and hospital environments.

For cleanliness management of semiconductor manufacturing, food factories and hospital environments.

  • ProblemProduct quality and work efficiency are unstable.
  • CountermeasureInstallation of Particle Sensing Monitor for each manufacturing area helps to monitor the frequency of particle generation constantly.
  • AchievementProduct quality and work efficiency is improved.

For electrical rooms or server rooms of the data center.

For electrical rooms or server rooms of the data center.

  • ProblemBreakdown of equipment in the electrical room (storage location for power supply system) due to insufficient indoor environment management occurs.
  • CountermeasureParticle Sensing Monitor helps monitoring and visualizing the presence of particle generation in real-time.
  • AchievementCleaning frequency can be controlled by visualizing particles inside.

For alarm trigger when the filter of clean booth or clean bench is damaged.

For alarm trigger when the filter of clean booth or clean bench is damaged.

  • ProblemFilter for the clean bench is broken during the work without noticing.
  • CountermeasureParticle Sensing Monitor helps monitoring and visualizing the presence of particles in real-time.
  • AchievementMonitoring particle generation in real-time helps to detect filter damage and reduce the work loss.

For improving manufacturing quality of semiconductors and precision parts.

For improving manufacturing quality of semiconductors and precision parts.

  • ProblemProduct defects and loss costs are increased due to foreign matter adhesion.
  • CountermeasureParticle Sensing Monitor is installed for continuous monitoring of priority control points.
  • AchievementFrequency of foreign matter generation is visualized and the number of defects is reduced after the countermeasure.

For status monitoring when the air conditioning system is off.

For status monitoring when the air conditioning system is off.

  • ProblemCleanliness level is unknown when the air conditioner is stopped at night and restarted the next morning.
  • CountermeasureTurning on Particle Sensing Monitor helps to know the cleanliness level when the air conditioning system is restarted.
  • Achievement

    Visualization of cleanliness tells you when the work should be started after the air conditioning system is ON.

Spesification

Particle Sensing Monitor Particle Sensor Unit
Model #(0.3μm):AES-□□□:
Model #(0.5μm):AES-□□□-5□:
FPM-1
FPM-51
FPM-2
FPM-52
FPM-3
FPM-53
FPM-4
FPM-54
FPS
FPS-5
Optical Source Laser Diode
Measurement Range Class1,000 to Class100,000(*1)
Unit pcs/m3(Default), pcs/cf, pcs/L(*2)
Data Update Time 1s
Power 12 to 24V(*3)
Power Consumption (max) +600mA +200mA
Operating Temperature 0 to 40℃
Storage Temperature -20 to 60℃
Operating Humidity 30 to 80%rh
Storage Humidity Below 90%rh (No condensation)
Output LED Level Display
Reference LED
Analog Voltage(1-5V)
Digital (Interface)
(Ethernet)

(Ethernet) (Wi-Fi)

(RS485)
Alarm Output
Temperature and
Humidity Measurement(*4)
Weight Approx. 210g Approx. 65g
Applicable Wire Size AWG26 to 20
  • (*1)Class1,000 is reference information.
  • (*2)Unit can be changed only for FPM-2/52/4/54. Unit for over a few μm is [pcs/min] as fixed.
  • (*3)The dedicated AC adapter is supplied separately as an option.
  • (*4)Temperature and humidity sensor (Model#: CHU-L151-11A-AES) is required as an option.

Specification for AES-FPM-□ & AES-FPS

Particle Sensing Monitor Particle Sensor Unit
Model #(0.3μm):AES-□□□ FPM-1 FPM-2 FPM-3 FPM-4 FPS
Detectable Particle Size Over 0.3μm / Over a few μm(Reference)
Output Average Time 60s

Specification for AES-FPM-5□ & AES-FPS-5

Particle Sensing Monitor Particle Sensor Unit
Model #(0.5μm):AES-□□□-5□ FPM-51 FPM-52 FPM-53 FPM-54 FPS-5
Detectable Particle Size Over 0.5μm / Over a few μm(Reference)
Output Average Time 300s average value

Get Adobe' Reader'

To view the pdf files, the Adobe Reader from Adobe Systems is required.

Researched by Shared Research Inc.
about Nihon Denkei Co., Ltd.